Extorr residual gas analyzers provide detailed vacuum gas analysis unmatched by any single competitive device. Each system includes a multi-gauged quadrupole probe with built-in Pirani and ion gauges, a control and communications unit (CCU), and software.

The integrated gauges act as a fail-safe interlock, protecting the RGA from operation at elevated pressures, while providing leak detection from atmosphere to ultra-high vacuum — no additional gauges required.

Key Capabilities
Mass Range
1–300 AMU
Detection
Faraday cup or electron multiplier
Pressure Range
Atmosphere to UHV
Interface
RS-232, Ethernet