Residual Gas Analyzers
Quadrupole mass spectrometers with integrated vacuum gauges
Extorr residual gas analyzers provide detailed vacuum gas analysis unmatched by any single competitive device. Each system includes a multi-gauged quadrupole probe with built-in Pirani and ion gauges, a control and communications unit (CCU), and software.
The integrated gauges act as a fail-safe interlock, protecting the RGA from operation at elevated pressures, while providing leak detection from atmosphere to ultra-high vacuum — no additional gauges required.
XTP Series Residual Gas Analyzer
Residual gas analyzer with an integrated computer — continuous process monitoring without a host PC.
XT Series Residual Gas Analyzer
The XT Series Residual Gas Analyzer from Extorr offers exceptional performance and value. Each system comes complete with built-in Pirani and Ion gauges.
Design a Custom Mass Spectrometer
Manifold, pump and inlet — sampling from outside an existing vacuum, and keeping the probe healthy.