Residual Gas Analyzer

The XT Series Residual Gas Analyzer (RGA) from Extorr offers exceptional performance and value. These RGAs provide a more detailed vacuum gas analysis than is offered by any other single competitive device. Each system comes complete with a multi-gauged quadrupole probe, encompassing built-in Pirani and Ion gauges, a control and communications unit (CCU), and a real-time Windows® software package.

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Residual Gas Analyzer

Features

  • Residual Gas Analyzer with Integrated Pirani and Ion Gauge 100, 200 and 300 amu systems
  • Faraday Detector with optional Electron Multiplier
  • Field Replaceable Dual Thoriated Iridium Filaments
  • Better than 0.5 amu resolution @ 10% peak height
  • 9 orders of magnitude dynamic range in a single scan
  • Mass spectra, leak detection and pressure vs. time modes

Applications

  • Leak testing
  • Process monitoring
  • Pump-down and bakeout monitoring
  • Vacuum diagnosis
  • Gas and contaminant identification

Overview

Why Choose Extorr

  1. Extorr engineers have been at the forefront of residual gas analyzer innovation since 1984, pioneering the development of affordable commercial Residual Gas Analyzers (RGAs) in the USA and globally.
  2. Our performance in terms of signal stability, sensitivity, and accuracy competes with top-tier mass spectrometers.
  3. Having built-in Pirani and Ion gauges within the RGA:
  • Acts as a fail-safe interlock, safeguarding the RGA components from operation at elevated pressures
  • Eliminates the need for costly gauge installations on the end system
  • Provides leak checking capabilities from atmospheric pressures down to ultra-high vacuum
  1. Our software is the most versatile on the market, providing users with complete access to probe and electronics settings. Researchers and industry professionals who require concentrated attention on particular aspects of their process or experiments find this aspect indispensable. All software and subsequent upgrades are free, and available for online download.
  2. We offer on-call support directly from the core technical/product development team.

Unparalleled Performance and Value

The Extorr XT Quadrupole Residual Gas Analyzer (RGA) systems are ideal for applications involving gas analysis, leak detection and vacuum processing. An Extorr RGA is often the only vacuum gauge that your system will require. This combination of flexibility and competitive price makes the Extorr your best vacuum measurement value.

The Vacuum Plus Feature

The XT systems feature an integrated Pirani gauge and a high-efficiency Bayard-Alpert ion gauge within a single Extorr probe, enabling accurate measurement and regulation of various vacuum pressures, while also ensuring system protection and eliminating the need for additional vacuum gauges.

Unique Probe Design

The probe, adhering to ultra-high vacuum standards, features an ionizer, quadrupole mass filter, and detector, optimized for RGA, Pirani, and ion gauge performance, and mounts onto a standard 2 3/4 inch CF flange, with a straightforward design that allows easy reassembly after cleaning.

Ultra Sensitive Electron Multiplier Detection

An off-axis channel type electron multiplier option is available for the Extorr Residual Gas Analyzer. Detection limits below 10-14 Torr are possible.

Ordering

Part NumberImageDescriptionDomestic Price
XT100
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Extorr 100 AMU Residual Gas Analyzer with Vacuum Plus Software

$4,350.00
XT100M
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Extorr 100 AMU Residual Gas Analyzer with both Electron Multiplier and Faraday cup. Including Vacuum Plus Software

$6,250.00
XT200
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Extorr 200 AMU Residual Gas Analyzer with Vacuum Plus Software

$5,650.00
XT200M
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Extorr 200 AMU Residual Gas Analyzer with both Electron Multiplier and Faraday cup. Including Vacuum Plus Software

$7,500.00
XT300
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Extorr 300 AMU Residual Gas Analyzer with Vacuum Plus Software

$6,900.00
XT300M
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Extorr 300 AMU Residual Gas Analyzer with both Electron Multiplier and Faraday cup. Including Vacuum Plus Software

$8,750.00