Residual Gas Analyzer
The XT Series Residual Gas Analyzer (RGA) from Extorr offers exceptional performance and value. These RGAs provide a more detailed vacuum gas analysis than is offered by any other single competitive device. Each system comes complete with a multi-gauged quadrupole probe, encompassing built-in Pirani and Ion gauges, a control and communications unit (CCU), and a real-time Windows® software package.
In stock, ready to ship
- Residual Gas Analyzer with Integrated Pirani and Ion Gauge 100, 200 and 300 amu systems
- Faraday Detector with optional Electron Multiplier
- Field Replaceable Dual Thoriated Iridium Filaments
- Better than 0.5 amu resolution @ 10% peak height
- 9 orders of magnitude dynamic range in a single scan
- Mass spectra, leak detection and pressure vs. time modes
- Leak testing
- Process monitoring
- Pump-down and bakeout monitoring
- Vacuum diagnosis
- Gas and contaminant identification
Why Choose Extorr
- Extorr engineers have been at the forefront of residual gas analyzer innovation since 1984, pioneering the development of affordable commercial Residual Gas Analyzers (RGAs) in the USA and globally.
- Our performance in terms of signal stability, sensitivity, and accuracy competes with top-tier mass spectrometers.
- Having built-in Pirani and Ion gauges within the RGA:
- Acts as a fail-safe interlock, safeguarding the RGA components from operation at elevated pressures
- Eliminates the need for costly gauge installations on the end system
- Provides leak checking capabilities from atmospheric pressures down to ultra-high vacuum
- Our software is the most versatile on the market, providing users with complete access to probe and electronics settings. Researchers and industry professionals who require concentrated attention on particular aspects of their process or experiments find this aspect indispensable. All software and subsequent upgrades are free, and available for online download.
- We offer on-call support directly from the core technical/product development team.
Unparalleled Performance and Value
The Extorr XT Quadrupole Residual Gas Analyzer (RGA) systems are ideal for applications involving gas analysis, leak detection and vacuum processing. An Extorr RGA is often the only vacuum gauge that your system will require. This combination of flexibility and competitive price makes the Extorr your best vacuum measurement value.
The Vacuum Plus Feature
The XT systems feature an integrated Pirani gauge and a high-efficiency Bayard-Alpert ion gauge within a single Extorr probe, enabling accurate measurement and regulation of various vacuum pressures, while also ensuring system protection and eliminating the need for additional vacuum gauges.
Unique Probe Design
The probe, adhering to ultra-high vacuum standards, features an ionizer, quadrupole mass filter, and detector, optimized for RGA, Pirani, and ion gauge performance, and mounts onto a standard 2 3/4 inch CF flange, with a straightforward design that allows easy reassembly after cleaning.
Ultra Sensitive Electron Multiplier Detection
An off-axis channel type electron multiplier option is available for the Extorr Residual Gas Analyzer. Detection limits below 10-14 Torr are possible.
Long life filaments
Long-life thoria coated iridium filaments are used for both RGA and ion gauge operation. The filament assembly is composed of two thoria coated iridium filaments, The filament supply in the CCU constantly monitors the filament resistance. When one of the filaments finally evaporates and fails, the resistance increases, warning the user to replace the filament assembly before electron emission becomes unavailable. This filament assembly is protected against vacuum excursions by both the ion and Pirani gauge functions. Because of this protection, filaments will last far longer than filaments in competitor’s RGA units. Extorr filaments are easily replaceable in the field. The replacement can be done in minutes, and for less than $100.
Sensitive Faraday Ion Detection
A Faraday cup detector is standard with 100, 200 and 300 amu systems. The ultra-sensitive, wide dynamic range amplifier detects ion currents from 10-6 to 10-15 Amps automatically. This allows partial pressure measurements from 10-4 to 10-11 Torr. This huge dynamic range means you can make measurements of small and large gas partial pressures in a single spectral scan. Since this same amplifier is used in conjunction with the electron multiplier when present, partial pressure measurements to below 10-14 Torr are possible.
Partial pressure spectral scans, partial pressure trends, audio leak detection, true total pressure measurement, and probe operating parameter modification are all features that are standard with Extorr XT systems. The intuitive nature of the Extorr Windows® computer environment makes for rapid system utility for both the seasoned RGA user as well as for the novice. Simplicity of communication makes for easy integration into existing computer vacuum control systems.
Extorr Vacuum Plus Windows Software
All Extorr systems come with VacuumPlus, a real-time Windows® software package at no extra cost. An intuitive graphical user interface makes the total functionality of the Extorr system available to the user. This starts with the first Pirani measurements, and continues on to ion gauge measurements and RGA partial pressure measurements. Complete pump down may be monitored both quickly and easily. The VacuumPlus program is fully interactive giving the user complete control of the graphical display. A number of graph or table windows may be opened, simultaneously, for monitoring multiple XT units. Data is captured and displayed in real-time. The user may choose to display data in torr, Pascal or amps. A logarithmic data display may be invoked so that partial pressures, which may vary by many orders of magnitude, may be displayed on a single graph. The software also allows for complete RGA probe control. There is easy mass scale tuning, sensitivity calibration, and ionizer setup. For further analysis, data files can be saved in a number of formats. Graphs may be set to a printer. Digital data may be saved in text format or an XML format for easy transfer into spreadsheets and other applications. Real-time streaming XML data is available for use in other user programs.
Exclusive Extorr Features
The Indestructible RGA with the best reliability in the industry
Extorr’s residual gas analyzers set a new standard for reliability.
- A solidly built vacuum probe with few troublesome screws.
- The filament and electron multiplier are protected by the Pirani gauge.
- Vacuum break, surprise outgassing, inadvertent vent, over pressure? No Problem!
- The electronic circuits are protected against probe shorts to the vacuum system walls.
Atmosphere to UHV measurement and leak detection
Our RGA’s come with built-in Pirani and Ion gauges for complete vacuum measurement. You can do leak detection at any pressure. Extorr is the only RGA manufacturer that offers these features. RGA’s are great for qualitative partial pressure measurements, but can only be used for quantitative readings when periodically calibrated against an accurate ion gauge to adjust for sensitivity changes as the ionizer ages. This is because low energy ions (5-10 EV) are needed for separation in a quadrupole mass filter. An ion gauge uses much higher ion energies (150 EV) than the RGA ionizer and is much less susceptible to sensitivity decrease due to aging. The Extorr ionizer has two regions that produce both low and high energy ions simultaneously and two separate detectors. Other manufacturers will report total pressure readings using various schemes that use the low energy ions created in the ionizer. The problem is that the readings will also decrease as the ionizer ages. Other manufacturers tell you to calibrate using an ion gauge, but they do not give you the ion gauge.
Best form factor
- Small size without any compromises in performance.
- No fan is used due to efficient circuitry, an important consideration for clean rooms and general reliability.
- Probe is strong enough to stand on its own. It needs no support nipple and is able to penetrate deep into the vacuum chamber on a 2-3/4 inch UHV flange with no special hardware.
Isolated RS-232 makes the Extorr RGA EMI proof
The computer interface uses a robust serial, optically isolated cable to connect the CCU to the host. Communications to the host computer are continuously checked for errors and retransmitted automatically without interruption of the data collection. The baud rate can be selected up to 115,200 for high speed on cables 50 feet or less. Lower the baud rate for even more noise immunity on longer cable runs.
Snap-in Electron Multiplier with warranty
If you want to upgrade or replace your electron multiplier, simply use a clean glove and snap it out with your fingers. No tools or disassembly of the probe are required. The CCU electronics will meter out just enough current to the electron multiplier to run it properly, avoiding destructive channel current during overpressure. We are so confident in the durability of the multiplier that we give a one year warranty against any failure, except of course, physical breakage or contamination.
If you do have a problem with your Extorr Residual Gas Analyzer, there is a software page that give complete diagnostic information about the probe and electronics. Over 90% of failures are able to be diagnosed and corrected over the phone or e-mail. By sending us the log from the Vacuum Plus software, we can tell exactly where the problem is and what to do about it.
The Best Sensitivity and Stability
We are confident that we have as good or better quality data as any instrument in this price range, giving you the best value. Designed for ease of use, easy to maintain, easy on your wallet.
Mass filter type
Faraday cup (FC), Standard Electron Multiplier (EM), Optional
Better than 0.5 amu @ 10% peak height. Adjustable to constant peak width throughout the mass range.
6 x 10-4 (FC). Measured with N2 @ 28 amu with 1 amu full peak width, 10% height, 70eV electron energy, 6eV ion energy and 2mA electron emission.
Minimum detectable partial pressure
* Measured by calculating one standard deviation of the baseline noise divided by the sensitivity for nitrogen.
Pirani gauge operating range
10-3 Torr to ATM
Ion gauge operating range
below 5 x 10-3 Torr
Partial pressures operating range
below 10-4 Torr
50 °C Electronics, 100 °C Probe
300 °C (Probe only, CCU removed)
Total pressure measurement
2 x 10-10 Torr to ATM
SS304, Kovar, Tungsten, Alumina, Iridium, Copper, Nickel, Thoria, Platinum
Open ion source, electron impact ionization
Dual thoria coated iridium with firmware protection. Built-in 1 to 30W degas ramp-up. Field replaceable.
11 to 150 eV, programmable
1 to 12 eV, programmable
0 to 150 V, programmable
Electron emission current
0.1 to 4 mA, programmable
6.8" from flange face to top of ionizer
Probe mounting flange
Minimum tube I.D.
3.3" x 4.8" x 7.4" Easily separated from probe for bakeout.
6.2" from flange face with mounting hardware.
Mass stability ± 0.1 amu after 30 minutes.
Minimum PC Requirements
PC running Windows 2000, XP, 7, 8, 10, or 11 with at least 1024 x 768 graphics, keyboard, mouse and 1 Unused USB or RS- 232C Port.
Included VacuumPlus Windows based application.
24 VDC @ 2.5 Amps. 120/240 VAC adaptor included.
9 lbs. Total, Probe and CCU.
The Extorr XT Series RGA software package.
All software is free. Upgrades can be performed at any time by downloading and executing the latest version below.
All software is forward and backward compatible, if you wish to go back to a previous version, simply download and re-install that version.
For information on how to install and set up the software with configuration data, see the RGA Quick Start Guide.
To download the factory configuration file for your serial number, see the XT Config File Download Page.
XT Standalone Firmware
Extorr XT Series RGA Standalone Firmware to implement custom controlling applications or LabView drivers.
Ionizer assembly for use with dual filaments (XTDUALFIL)
XT RGA Filament
Dual thoria coated iridium filament, must use with XTIONIZER
XT RGA Probe
XT Series RGA Probe
XT RGA CCU
XT Series RGA Command and Control Unit
XT Power Supply Board
Power Supply Board for all XT models
XT RF Board
XT Series RGA RF Board
XT EL Board
XT Series RGA Electrometer Board
XT Power Supply Shield Board
XT Series RGA Power Supply shield board
XT RF Shield Board
RF Shield Board
XT 24V Power Supply
24 Volt 50 Watt power supply, Input 100-240 VAC 50-60 Hz
Power Cord for PS24VDC, NA
Power Cord for PS24VDC, North America, User must Install plug end for other Countries
XT Thumb Screws
Thumb Screws to hold CCU to Analyzer
XT RGA Feedthrough
Vacuum Feedthrough, with Pirani Gauge
XT Mass Filter
XT Series RGA Mass Filter
Frame with Faraday Detector Assembly for XTx00(M) Analyzers
Electron Multiplier for XTx00M
XT Multiplier Power Supply
Electron Multiplier High Voltage Power Supply for XTx00M
|Part Number||Image||Description||Domestic Price|
Extorr 100 AMU Residual Gas Analyzer with Vacuum Plus Software
Extorr 100 AMU Residual Gas Analyzer with both Electron Multiplier and Faraday cup. Including Vacuum Plus Software
Extorr 200 AMU Residual Gas Analyzer with Vacuum Plus Software
Extorr 200 AMU Residual Gas Analyzer with both Electron Multiplier and Faraday cup. Including Vacuum Plus Software
Extorr 300 AMU Residual Gas Analyzer with Vacuum Plus Software
Extorr 300 AMU Residual Gas Analyzer with both Electron Multiplier and Faraday cup. Including Vacuum Plus Software