Residual Gas Analyzer

The XT Series Residual Gas Analyzer (RGA) from Extorr offers exceptional performance and value. These RGAs provide a more detailed vacuum gas analysis than is offered by any other single competitive device. Each system comes complete with a multi-gauged quadrupole probe, encompassing built-in Pirani and Ion gauges, a control and communications unit (CCU), and a real-time Windows® software package.

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Residual Gas Analyzer

Features

  • Residual Gas Analyzer with Integrated Pirani and Ion Gauge 100, 200 and 300 amu systems
  • Faraday Detector with optional Electron Multiplier
  • Field Replaceable Dual Thoriated Iridium Filaments
  • Better than 0.5 amu resolution @ 10% peak height
  • 8 orders of magnitude dynamic range in a single scan
  • Mass spectra, leak detection and pressure vs. time modes

Applications

  • Leak testing
  • Process monitoring
  • Pump-down and bakeout monitoring
  • Vacuum diagnosis
  • Gas and contaminant identification

Overview

Unparalleled Performance and Value

The Extorr XT Quadrupole Residual Gas Analyzer (RGA) systems are ideal for applications involving gas analysis, leak detection and vacuum processing. An Extorr RGA is often the only vacuum gauge that your system will require. This combination of flexibility and competitive price makes the Extorr your best vacuum measurement value.

The Vacuum Plus Feature

The XT systems come with built-in Pirani and Bayard-Alpert type ion gauges. The Pirani gauge is built into the base of the probe and is integrated with the software and CCU (Communications and Control Unit) to measure the early pump down pressures of a rough vacuum. The Pirani gauge is also used to regulate the startup of both the ion gauge and the Quadrupole for partial pressure measurements. The Pirani gauge also performs the critical functions of protecting the filament and the electron multiplier by recognizing when the system is in an over-pressure condition. The ion source end of the probe acts as a high efficiency ion producer for both the quadrupole mass filter and for a high quality Bayard-Alpert gauge. So intermediate vacuum pressure, total vacuum pressure and partial vacuum pressure may be measured using a single Extorr probe. There is no longer a need for any other vacuum gauge for your system.

Unique Probe Design

The probe consists of an ionizer, quadrupole mass filter and detector. While adhering to the most stringent ultra high vacuum standards, the novel design optimizes RGA, Pirani and ion gauge performance. The rugged probe assembly mounts onto a standard 2 3/4 inch CF flange. The end of the probe extends 6.8 inches (173 mm) from the mounting flange face. It requires no added vacuum extension nipple. Such a nipple (Extorr model number N-500) may be used give the user a required clearance in the vacuum system. The probe is designed using self-aligning parts and may be easily reassembled after cleaning.

Ultra Sensitive Electron Multiplier Detection

A robust Electron Multiplier detector option is available for all XT systems. This detection enhancement system operates by converting each ion into an avalanche of electrons. This results in a current amplification which may approach a million. Practical amplifications of a thousand to ten thousand can increase instrument sensitivity by an equal amount. Perhaps most importantly, a desired spectral signal to noise ratio may be achieved in less than 1/1000 of the time as for the equivalent Faraday detector scan. The XT100M, XT200M, and XT300M come with the electron multiplier detection installed. As a field installable upgrade, the multiplier detection system may be added to any of Extorr’s 100, 200 and 300 amu systems. The multiplier field upgrade requires that a high voltage mini-module be placed into the CCU electronics and Extorr’s continuous dynode multiplier be easily installed into the probe by hand. The current VacuumPlus software supports both detection systems. Just as for the ionizer filament and the RF, the built-in Pirani and BA ion gauge protect the multiplier against over pressure. For non-interfering portions of the residual gas spectrum, the multiplier detection system allows for partial pressure readings of lower than 10-14 Torr.

Ordering

Part NumberImageDescriptionDomestic Price
XT100
none provided

Extorr 100 AMU Residual Gas Analyzer with Vacuum Plus Software

$3,950.00
XT100M
none provided

Extorr 100 AMU Residual Gas Analyzer with both Electron Multiplier and Faraday cup. Including Vacuum Plus Software

$5,650.00
XT200
none provided

Extorr 200 AMU Residual Gas Analyzer with Vacuum Plus Software

$5,100.00
XT200M
none provided

Extorr 200 AMU Residual Gas Analyzer with both Electron Multiplier and Faraday cup. Including Vacuum Plus Software

$6,800.00
XT300
none provided

Extorr 300 AMU Residual Gas Analyzer with Vacuum Plus Software

$6,250.00
XT300M
none provided

Extorr 300 AMU Residual Gas Analyzer with both Electron Multiplier and Faraday cup. Including Vacuum Plus Software

$7,950.00