Description: XT Series Probe Manifolds are high conductance vacuum tees for connecting a gas inlet valve and an Extorr quadrupole probe to a high vacuum pump. The manifolds maintain a high pumping speed to the RGA for less background gas interference. All manifolds are made from 304 stainless steel and have 2 x 2.75-inch (DN 40 CF) ConFlat (CF) flanges for the RGA Probe and inlet. XT Probe Manifold pump flanges are available to fit most turbomolecular vacuum pumps. Stainless steel mounting hardware and copper gaskets for the CF flanges are included with the XT Probe Manifold.
General, RGA, and Inlet Flange Specifications (for all models):
| Material | 304 stainless steel |
| Mounting Hardware Supplied | 12 pcs. ¼-28 x 1.50 inch SS bolts, nuts, flat washers, and 2 x 2 ¾ inch CF copper gaskets |
| Weight | 5. lbs |
| RGA and Inlet Flanges | 2 X 2 ¾ inch CF (DN 40 CF) non-rotatable |
Pump Flange Specifications:
| P/N - MAN450C | 4.50 inch CF (DN 63 CF) non-rotatable flange, 6 pcs ¼ -28 x 1.5 inch SS bolts, nuts, flat washers, and 4.50 inch (DN 63 CF) copper gasket |
| P/N - MAN63S | ISO 63 flange |
| P/N - MAN40S | ISO 40 flange |
| P/N - MAN40K | DN 40 KF flange |
| Product Number | Description | Operations Notes |
|---|---|---|
| MAN450C | Probe manifold with 2 x 2 ¾ inch CF flanges (DN 40 CF) and 4.50 inch CF flange (DN 63 CF) for pump, mounting hardware, and CF copper gasket (for 2 ¾ inch CF flange) | • Recommended for best pumping speed to RGA • All metal seal on pump flange |
| MAN63S | Probe manifold with 2 x 2 ¾ inch CF flanges (DN 40 CF) for inlet probe, 63 ISO flange for pump, mounting hardware, and CF copper gasket (for 2.75 inch CF flange) | • Recommended for best pumping speed to RGA • Rubber O-ring seal on pump flange |
| MAN40S | Probe manifold with 2 x 2 ¾ inch CF flanges (DN 40 CF) and 40 ISO for pump, mounting hardware, and CF copper gasket (for 2.75 inch CF flange) | • Fits to smaller pumps (compromised pumping speed to RGA) |
| MAN40K | Probe manifold with 2 x 2 ¾ inch CF flanges (DN 40 CF) and DN 40 KF for pump, mounting hardware, and CF copper gasket (for 2.75 inch CF flange) | • Fits to smaller pumps (compromised pumping speed to RGA) |
| File | Document Type | Language | Date | File Size | |
|---|---|---|---|---|---|
| XT Series Probe Manifold Datasheet | English | 01-10-2023 | 605 KB |  |