Description:
The High Conductance Valve with one or two pressure reduction bypasses is made from 304 stainless steel and has 2 DN 40 CF, 2 ¾ inch ConFlat (CF) flanges. Each pressure reduction bypass has a Swagelok bypass valve and a flow control orifice. The high conductance valve is sealed with an Elastomer poppet seal. The vacuum side of the valve connects to the RGA chamber and the high-pressure side connects to the customer’s process chamber. In a dual bypass model, when all three valves are closed (Hi-C and 2 Swagelok), the RGA is isolated from the process chamber. Opening either pressure reduction valve allows the RGA to sample the customer’s high-pressure process through a flow restricting aperture. The aperture(s) may be sized for processes that operate at different pressures. If the process chamber base pressure is low enough, the high conductance valve may be opened to measure the background gasses or for leak checking the process chamber. Stainless steel mounting hardware is included with copper gaskets for the CF flanges and extra VCR gaskets for the bypass valves. Valve assembly comes leak tested and assembled with 1 flow control orifice per bypass valve.
| Material | 304 Stainless Steel |
| Weight | 6 lbs. |
| Max Temperature Rating | Bakeable to 150 °C |
| High Conductance Valve | Elastomer O-ring seal |
| Flange Dimensions | 2-3/4 in. OD ConFlat Flange, 1.5 in. Tube OD |
| Swagelok Valve Connection Size | ¼ inch VCR with flow control orifice sized to the customer’s request |
| Product Number | Description |
|---|---|
| VAHCK150V2 | High Conductance Valve with 2 Bellows-Sealed Swagelok Bypass valves, and 2 ConFlat to VCR adapters with 2 arms each, twelve ¼-28 nuts and washers, 2 flow control orifices for Bypass Valves, and 2 copper gaskets |
| VAHCK150V1 | High Conductance Valve with 1 Bellows-Sealed Swagelok Bypass valve, and 2 ConFlat to VCR adapters with 2 arms each (one arm plugged), twelve ¼-28 nuts and washers, 1 flow control orifice for Bypass Valve, and 2 copper gaskets |
| File | Document Type | Language | Date | File Size | |
|---|---|---|---|---|---|
| XT Series High Conductance Valve with Pressure Reduction Bypass(es) Datasheet | English | 01-10-2023 | 565 KB |  |