Residual Gas Analyzer Models XTx00(M)

Mass Range
XT1001 to 100 amu Faraday cup (FC)
XT2001 to 200 amu Faraday cup (FC)
XT3001 to 300 amu Faraday cup (FC)
XT100M1 to 100 amu Faraday cup (FC) and Electron Multiplier (EM)
XT200M1 to 200 amu Faraday cup (FC) and Electron Multiplier (EM)
XT300M1 to 300 amu Faraday cup (FC) and Electron Multiplier (EM)
Mass filter typeQuadrupole
Detector type
Faraday cup (FC), Standard Electron Multiplier (EM), Optional
Resolution
Better than 0.5 amu @ 10% peak height. Adjustable to constant peak width throughout the mass range.

Sensitivity (A/Torr)
5 x 10-4 into Faraday cup. Measured with N2 @ 28 amu with 1 amu full peak width, 10% height, 70 eV electron energy, 6 eV ion energy and2 mA electron emission.
Minimum detectable partial pressureMeasured with N2 @ 28 amu with 1 amu full peak width, 10% height, 70eV electron energy, 6 eV ion energy, and 2 mA electron emission.
Faraday cup 5 x 10-12
Electron multiplier 5 x 10-14
Operating range
UHV to Atmosphere
Pirani gauge 10-3 Torr to ATM
Ion Gauge operation below 10-2 Torr
Partial Pressures operation below 10-4 Torr
Operating temperature
50 °C Electronics, 100 °C Probe
Bakeout temperature
300 °C (Probe only, CCU removed)
Total pressure
measurement
Pirani gauge 10-3 Torr to ATM
Ion Gauge 2 x 10-10 Torr to 10-2 Torr
Probe Materials
SS304, Kovar, Tungsten, Alumina, Iridium, Copper, Nickel, Thoria, Platinum
Ionizer Design
Open ion source, electron impact ionization
Filament
Dual thoria coated iridium with firmware protection. Built-in 1 to 30W degas ramp-up. Field replaceable.
Electron energy
11 to 150V, programmable
Ion energy
1 to 12V, programmable
Focus Voltage
Electron emission current0.1 to 4 mA, programmable
Probe Dimensions
6.8” from flange face to top of ionizer
Probe mounting
flange
2.75” CF
Minimum tube I.D.
1.375”
CCU Dimensions
3.3” x 4.8” x 7.4”, Easily separated from probe for bakeout.
CCU Extension
6.2” from flange face with mounting hardware.
Warm-up time
Mass stability ± 0.1 amu after 30 minutes.
Computer Interface
RS-232C, up to 115,200 baud, or USB.
Minimum PC
Requirements
PC running Windows 2000, XP, 7, 8, or 10 with 1024 x 768 VGA graphics, keyboard, mouse, CD ROM Drive, and 1 Unused USB or RS- 232C Port.
Software
Included VacuumPlus Windows based application.
Power requirement
24 VDC @ 2.5 Amps. 120/240 VAC adaptor included.
Weight
9 lbs. Total, Probe and CCU.

FileDocument TypeLanguageDateFile Size 
XT Series Residual Gas Analyzers DatasheetPDFEnglish02-05-2016772 KB
XT Series Residual Gas Analyzers DatasheetdocxEnglish02-05-20161.62 MB