Home Up Contents Search Contact Extorr

 

Residual Gas Analyzer Models XTx00(M)

Mass range XT100, XT100M 1 to 100 amu
XT200 , XT200M 1 to 200 amu
XT300, XT300M 1 to 300 amu
Mass filter type Quadrupole
Resolution Greater than 1 amu @ 10% peak height, adjustable
Operating pressure Atmosphere to UHV ( ion gauge operation below 10-2 torr, RGA operation below 10-3 torr and Multiplier operation below 10-6 torr)
Partial Pressure Detector type Faraday cup
Partial Pressure Sensitivity (A/Torr) 5x10-4 into Faraday cup. Measured with N2 @ 28 amu with 1 amu full peak width, 10% height, 70 eV electron energy, 6 eV ion energy and 2 mA electron emission current.
Minimum detectable partial pressure 5x10-14 torr with Multiplier. Measured with N2 @ 28 amu with 1 amu full peak width, 10% height, 70 eV electron energy, 6 eV ion energy, and 2 mA electron emission current. 10-11 torr with Faraday cup.
Total Pressure Detector type  >10-3 Torr Pirani type, (measures heat loss from noble metal wire)
Total Pressure Detector type <10-3 Torr Bayard/Alpert type ion gauge, x-ray limit 10-9
CCU Max. operating temperature 70°C
CCU temperature sensor solid state sensor in CCU, temperature continuously monitored and displayed
Bakeout temperature 350°C (without CCU)
Probe operating temperature 100°C,  Platinum RTD on probe, temperature continuously monitored and displayed
Ionizer Design Open ion source , electron impact ionization.
Probe Materials SS304, Kovar, Tungsten, Alumina, Iridium, Copper, Nickel
Filament Dual Thoriated Iridium with firmware protection.
Degas Built-in 1 to 30 W ramp-up.
Electron energy 10 to 150 V, continuously programmable
Ion energy 3 to 10 V, continuously programmable
Electron emission current 0.1 to 5 mA, continuously programmable
Probe mounting Minimum tube I.D. 1.375"  flange 2.75" CF
CCU dimensions 3.3" x 4.8"x 7.5". Easily separated from the probe for bakeout
Mass stability ±0.1 amu after 30 minutes warmup.
Computer interface RS-232C, 9600 - 115,200 Baud
Software Windows®  2000, XP based application.
Power requirement 24 VDC @ 2.1 Amps. Standard 120 VAC adapter supplied.
Weight 5 lbs.

Send mail to webmaster with questions or comments about this web site.
Last modified: 07/17/06