|
| |
Servicing the Analyzer probe
Ionizer Replacement
There are 2 reasons to replace the ionizer, filament failure and
contamination resulting from sustained normal operation at high (>10-6
Torr)
pressures. A probe can also be contaminated in a matter of minutes due to
misuse. The filament will eventually fail after years of operation even in a
clean UHV system due to the thoria coating on it eventually decomposing and
evaporating. Unlike other RGA's the Extorr filament will not fail due to
operation at very high pressures because it is protected by the pirani gauge
output. A filament failure can be verified by looking at the DIAGNOSTICS
readings on the OUTPUTS page. If there is an open filament, the filament
voltage will read > 5 volts and there will be < .1 amp filament current. The
filament light icon will not stay yellow on the main window.
Always handle the probe with clean gloves, or you will see the results of
your contamination on the next scan. A fingerprint will outgas and cause
peaks at virtually every amu until it is evaporated or turned into low vapor
pressure compounds in your vacuum system. Of course other sources of
contamination such as diffusion or mechanical pump oil could cause similar
problems. Even after the volatiles are gone, the residue may cause the probe
to operate improperly by leaving behind insulating compounds, or high
secondary electron yielding surfaces where there is contamination. This can
cause charge from electrons to build up on these insulators and disturb the
electric fields in the ionizer or the mass filter.
The results of contamination could cause low sensitivity for
partial pressure readings. It generally take a very severe contamination to
cause the total pressure readings to be low because the B/A type gauge uses
higher voltages and works with more energetic ions that are less susceptible
to stray fields. If you have a total pressure reading of 10-7 for
example, your partial pressure readings should add up to about that. A
number of factors such as the relative sensitivities of different compounds
and the cracking of molecules into fragments in the ionizer makes it
unlikely that they will add up exactly, but as the ionizer contamination
increases, you may see a an order of magnitude or more difference between
the total pressure and the sum of partial pressures. Cleaning the ionizer is
difficult if not impossible in most cases, so replacement is the remedy. It
is also likely that some contamination will make it to the rods of the
quadrupole, as a direct result of the principle of operation of this type of
analyzer. So when replacing the ionizer due to low sensitivity, it is a good
idea to clean the quadrupole rods also.
At the factory, all parts are mechanically cleaned, then vacuum baked, and then plasma
cleaned. If you are doing UHV work and demand the best cleanliness, you can
send the analyzer to the factory for refurbishment, but many customers have
had good success with the following method. The rods are best cleaned with
an abrasive method, such as 1200 grit abrasive paper polishing, followed by
an Alconox ultrasonic bath and several rinses with distilled water.
The Extorr probe was designed to allow easy cleaning and ionizer
replacement, the only tool required is an allen wrench to loosen the set
screws that hold the ionizer to the probe. This is supplied with all new
ionizers.
The following steps will usually restore the XT system to proper
operation:
click to enlarge pictures
| Step 1 |
 |
|
Placing the analyzer onto the CCU without the
thumbscrews makes a good stand for the repair. Using a small pair of
needle nose pliers or a strong pair of tweezers, slide the 4 tublar
spring connectors completely up onto the ionizer wires. Loosen both
of the set screws on the 2 barrel connectors that connect the
filament wires and slide them down the wires towards the feedthrough.
|
| Step 2 |
 |
|
Remove the ionizer by pulling upward, a gentle
twisting action may be necessary. If you are replacing the ionizer
due to an open filament, and the instrument had been working
properly otherwise, you can skip to step 7. |
| Step 3 |
 |
 |
Using a hook made from some .062 diameter wire, pull
the mass filter out of the frame. |
| Step 4 |
 |
|
|
| Step 5 |
 |
|
Clean the surfaces of the rods with 1200 grit
alumina abrasive paper until they are bright. Using a waterproof
paper with water works well. Be careful not to bend the electrical
contacts. Then clean in Alconox detergent using an ultrasonic
cleaner at 40 kHz. Rinse well with distilled water in the ultrasonic
bath several times, then dry at 75 degrees C. |
| Step 6 |
 |
|
Next insert the mass filter into the probe, being
careful to line up the 2 wires with the two holes in the end of the
mass filter that make the electrical contact. |
| Step 7 |
 |
|
Remove the 4 spring connectors from the old ionizer
and push them onto the respective pins on the new ionizer. push the
new ionizer down onto the probe, carefully engaging the center pin
and BA shield spring, until the focus plate on the ionizer is flush with the top of
the mass filter ceramic end.
|
| Step 8 |
 |
 |
While holding the ionizer in place against the focus
plate, move the barrel connectors into place and tighten the set
screws. Then slide the 4 tubular connectors down onto the
appropriate wires to make the final electrical connections. Be
careful that the wires do not short to each other or the frame. You
can bend the wires from the feedthrough easily if necessary, but do
not bend the wires from the ionizer or you may crack the ceramics. |
|